ILSR series is composed to enable continuous coating of the single and multi-layered thin film, and is a multi-chamber equipment enabling continuous coating of the metal and reactive materials. The ILSR series is composed to be appropriate for the TFT and color filter of the display.

Application products | Application Products

The ILSR series of AT Co., LTD separates into metal or reactive materials to enable continuous coating on the material; therefore, it is applicable in AMOLED and LCD products and also applied to the TFT / Color Filter process. Moreover, it can be applied as manufacturing equipment in the touch product field and the energy field.

Display field TFT and Color Filter (AMOLED, LCD)
Touch product field IM-ITO
Other industrial field New regeneration energy and solar cell energy
System specifications | System Specifications

The ILSI series coating equipment manufacturing method of AT Co., LTD is based on the customer request specification to manufacture the product in optimum efficiency. Based on this factor, the common specifications below are reflected to manufacture and supply the equipment

Chamber type Vertical and horizontal method of multi-chamber
Applied material Glass and Wafer, other plastic, metal materials
Board size Vertical type 2,200mm x 2,500mm
Horizontal type 1,500mm x 1,800mm
Tact time 60 sec or less (Static film)
35 sec or less (Moving film)
Coating source Sputter source Rotary cathode, Planar cathode
Thermal source Crucible, E-beam
Coating material Metal material Al, Ti, Cr, Cu, NiCr, Ni, Ag, other metal material
Reactive material TiO2, Nb2O5, SiO2, TIO, SiAlOx, MoOx, other nitrating / oxidative material
Power supply DC, Pulse DC, MF
Thickness uniformity ±10% or less (Static film)
±5% or less (Moving film)
Measuring instrument Sheet resistance, optic (Penetration rate, reflection rate, color-difference meter),
plasma emission monitor, RGA