ILSI series is composed to enable continuous coating of the single thin film and multi-layered thin film, and it is multi-chamber equipment enabling continuous coating of the metal and reactive materials.

Application Products

The ILSI series of Advanced Technologies Co., Ltd enable continuous coating of metal material or the reactive material, and can be applied to application products in various industrial fields

Household appliances field Decorative coating on household products and exterior of mobile devices
Energy field Architectural window glass, solar cell
Other industrial field Metal thin film and oxide thin film, multi-layered thin film coating based application field
System Specifications

The ILSI series coating equipment manufacturing method of Advanced Technologies Co., Ltd is based on the customer request specification to manufacture the product in optimum efficiency. Based on this factor, the common specifications below are reflected to manufacture and supply the equipment.

Chamber type Vertical and horizontal method of multi-chamber
Applied material Glass and Wafer, other plastic, metal materials
Substrate size Vertical type 2,200mm x 2,500mm
Horizontal type 1,500mm x 1,800mm
Tact time 60 sec or less (Static method)
35 sec or less (Dynamic method)
Coating source Sputter source Rotary cathode, Planar cathode
Thermal source Crucible, E-beam
Coating material Metal material Al, Ti, Cr, Cu, NiCr, Ni, Ag, other metal material
Reactive material TiO2, Nb2O5, SiO2, TIO, SiAlOx, MoOx, other nitride / oxide material
Power supply DC, Pulse DC, MF
Thickness uniformity ±10% or less (Static film)
±5% or less (Moving film)
Measuring instrument Sheet resistance, optic (Transmittance, reflectance, color-difference meter),
plasma emission monitor, RGA