TITAN series is composed to enable continuous coating of single thin film and multi-layered thin film, and is equipment composed of single vacuum chamber to enable continuous coating on the metal and reactive materials.

Application Products

The TITAN series of Advanced Technologies Co., Ltd separates the metal material or the reactive material to enable continuous coating of hetero-material, and can be applied to various application products.

IT field IM-ITO and metal mesh touch film, Bezel metallization of display
Energy field Thin film solar cell, Li secondary battery
Other industrial field Multi-layered thin film coating based application field
System specifications

The R2R coating equipment manufacturing method of Advanced Technologies Co., Ltd is based on the customer request specification to manufacture the product in optimum efficiency. Based on this factor, the common specifications below are reflected to manufacture and supply the equipment.

Chamber type Rectangular type single chamber
Applied material PET, PI film, other flexible polymer film, metal film
Core size 3inch, 6inch
Material specification Width Length Thickness (Polymer) Thickness (Metal)
Max. 1,350㎜ Max. ø550㎜ Min. 23㎛ 10㎛ ~ 400㎛
Winding speed Max. 20m/min
Pre-treatment method Pre-heating Max. 200℃
Plasma surface treatment DC, Pulse DC, Linear ion beam source
Coating source Sputter source

Single planar cathode
Dual planar cathode
Single rotary cathode
Dual rotary cathode
Thermal source Crucible, E-beam
Plasma assist source Plasma assist source
Coating material Metal material Al, Ti, Cr, Cu, NiCr, Ni, Ag, other metal material
Reactive material TiO2, Nb2O5, SiO2, TIO, SiAlOx, MoOx, other nitride / oxide material
Power supply DC, Pulse DC, MF
Pump Selection of the pump proper to the equipment specification
Measuring instrument Sheet resistance, optic (Transmittance, reflectance, color-difference meter),
plasma emission monitor, RGA
Web align EPC module